Several hemi procharger in common use flowrate control methods in semiconductor wafer clean tool are introduced in this paper, including the flowrate control of process chamber and chemical proportioning, then corresponding control methods are brought forward according to different applications.The chemical flowrate is directly used as the feedback
In a human society with emergent technology, the destructive actions of some pose a danger to the survival of all of humankind, increasing the need to maintain peace by overcoming universal conflicts.However, human society has not yet achieved complete global peacekeeping.Fortunately, a new possibility for peacekeeping among human societies using t
Summary: The immune-genetic changes that occur in cancer patients experiencing hyperprogressive disease (HPD) during combined immunotherapy are unclear.In this study, HPD patients with pre- and post-HPD samples and non-HPD patients with solid tumors were hemi procharger molecularly characterized by genetic and tumor immune microenvironment (TiME) a
The moving target defense (MTD) is a proactive cybersecurity defense technique that constantly changes potentially vulnerable points to be attacked, to confuse the attackers, making it difficult for attackers to infer the system configuration and nullify reconnaissance activities to a victim system.We consider an MTD strategy for software-defined n